Version 1
: Received: 26 February 2021 / Approved: 1 March 2021 / Online: 1 March 2021 (13:24:14 CET)
How to cite:
Listewnik, P.; Bechelany, M.; Szczerska, M. Optimization of the ZnO ALD Coating of a Photonic Microsphere-Based Temperature Sensor. Preprints2021, 2021030013. https://doi.org/10.20944/preprints202103.0013.v1
Listewnik, P.; Bechelany, M.; Szczerska, M. Optimization of the ZnO ALD Coating of a Photonic Microsphere-Based Temperature Sensor. Preprints 2021, 2021030013. https://doi.org/10.20944/preprints202103.0013.v1
Listewnik, P.; Bechelany, M.; Szczerska, M. Optimization of the ZnO ALD Coating of a Photonic Microsphere-Based Temperature Sensor. Preprints2021, 2021030013. https://doi.org/10.20944/preprints202103.0013.v1
APA Style
Listewnik, P., Bechelany, M., & Szczerska, M. (2021). Optimization of the ZnO ALD Coating of a Photonic Microsphere-Based Temperature Sensor. Preprints. https://doi.org/10.20944/preprints202103.0013.v1
Chicago/Turabian Style
Listewnik, P., Mikhael Bechelany and Małgorzata Szczerska. 2021 "Optimization of the ZnO ALD Coating of a Photonic Microsphere-Based Temperature Sensor" Preprints. https://doi.org/10.20944/preprints202103.0013.v1
Abstract
This study presents of the microsphere-based fiber-optic sensor with the ZnO ALD coating thickness of 100 nm and 200 nm for temperature measurements. Metrological properties of the sensor were investigated over the temperature range of 100°C to 300°C, with a 10°C step. The interferometric signal is used to control whether the microstructure is intact. Spectrum shift of a reflected signal is used to conclude changes in measured parameter for the sensor with a 100 nm coating, while the reflected signal intensity is an indicator during measurements executed by a sensor with a 200 nm coating. With changing temperature, the peak position or intensity of a reflected signal also changes. The R2 coefficient of the presented sensors indicates a linear fit of over 0.99 to the obtained data. The sensitivity of the sensors, investigated in this study, equals 103.5 nW/°C and 0.019 nm/°C for ZnO thickness of 200 nm and 100 nm, respectively.
Copyright:
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.