Zhou, Z.; Chao, M.; Su, X.; Fu, S.; Liu, R.; Li, Z.; Bo, S.; Chen, Z.; Wu, Z.; Han, X. Silicon–Organic Hybrid Electro-Optic Modulator and Microwave Photonics Signal Processing Applications. Micromachines2023, 14, 1977.
Zhou, Z.; Chao, M.; Su, X.; Fu, S.; Liu, R.; Li, Z.; Bo, S.; Chen, Z.; Wu, Z.; Han, X. Silicon–Organic Hybrid Electro-Optic Modulator and Microwave Photonics Signal Processing Applications. Micromachines 2023, 14, 1977.
Zhou, Z.; Chao, M.; Su, X.; Fu, S.; Liu, R.; Li, Z.; Bo, S.; Chen, Z.; Wu, Z.; Han, X. Silicon–Organic Hybrid Electro-Optic Modulator and Microwave Photonics Signal Processing Applications. Micromachines2023, 14, 1977.
Zhou, Z.; Chao, M.; Su, X.; Fu, S.; Liu, R.; Li, Z.; Bo, S.; Chen, Z.; Wu, Z.; Han, X. Silicon–Organic Hybrid Electro-Optic Modulator and Microwave Photonics Signal Processing Applications. Micromachines 2023, 14, 1977.
Abstract
Electro-optic modulator (EOM) is one of the key devices of high-speed optical fiber communication system and ultra-wideband microwave photonic system. Silicon-organic hybrid (SOH) integration platform combines the advantages of silicon photonics and organic materials, providing a high electro-optic effect and compact structure for photonic integrated devices. In this paper we present a SOH integrated EOM with comprehensive investigation of EOM structure design, silicon waveguide fabrication with Slot structure, on-chip poling of organic electro-optic material, and characterization of EO modulation response. The SOH integrated EOM is measured with 3dB-bandwidth of over 50 GHz and half-wave voltage length product of 0.26 V·cm. Furthermore, we demonstrate a microwave photonics phase shifter by using the fabricated SOH integrated dual parallel Mach-Zehnder modulator. The phase shift range of 410 degree is completed from 8 GHz to 26 GHz with a power consumption of less than 38 mW.
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